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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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Angle measurement using the integrated amplitude of difference beam from an optical phased array.
Optics Express
|August 13, 2025
Summary
We developed a new angle measurement method using an optical phase array (OPA) that improves precision fourfold. This technique, AMCIAD, enhances accuracy over traditional amplitude comparison methods for precise angular positioning.
Area of Science:
- Optics and Photonics
- Metrology
- Optical Engineering
Background:
- Traditional angle measurement methods, such as comparing amplitude (AMCA), have limitations in precision.
- Optical Phase Arrays (OPAs) offer advanced beam-forming capabilities not fully utilized in existing angle measurement techniques.
Purpose of the Study:
- To introduce and validate a novel angle measurement method, AMCIAD, leveraging OPA technology for enhanced precision.
- To compare the performance of AMCIAD against the traditional AMCA method.
Main Methods:
- Utilizing an on-chip OPA to generate difference beams for object scanning.
- Developing a specialized algorithm to compute angular position from reflected light.
- Implementing the AMCIAD technique by comparing the integrated amplitude of the difference beam.
Main Results:
- The AMCIAD method demonstrated a significant improvement in angle measurement accuracy, achieving approximately four times greater precision than AMCA.
- Experimental results showed an accuracy of 0.13° for AMCIAD compared to 0.60° for AMCA.
- Achieved angular accuracy equivalent to approximately 4% of the beam width.
Conclusions:
- The proposed AMCIAD method offers a substantial advancement in angle measurement precision through the use of OPA beam-forming.
- This technique provides a more accurate and efficient approach for angular positioning applications.
- AMCIAD represents a significant improvement over conventional methods, paving the way for more precise optical metrology.
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