A miniature reflective varifocal vector scanner

In many optical applications, light manipulations such as scanning, focusing, and beam shaping are typically achieved through separate components. Combining these functionalities into a single component yields a compact, multifunctional device, resulting in higher optical efficiency and easier integration into optical setups. In this work, we introduce a reflective optomechanical device that combines scanning and focusing functions, enabling 3D scanning. Its actuation mechanism enables non-resonant vector scanning, dynamic beam focusing, and precise out-of-plane displacement, allowing it to operate effectively as a piston mirror as well. In the current version, the device can achieve up to ±3.5° mechanical tilt angles, i.e., 14° field of view and a focal power tuning range of ±16 m^-1.