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Linear and passive silicon-on-insulator refractive index sensor utilizing Bragg grating-assisted Michelson
Optics Express
|August 13, 2025
Summary
This study introduces a novel silicon-on-insulator refractive index sensor that provides a linear response for monitoring gas concentrations. Its design ensures a constant figure of merit, enabling reliable performance across various refractive index changes.
Area of Science:
- Photonics and Sensing Technology
- Integrated Optics
- Materials Science
Background:
- Conventional refractive index (RI) sensors often exhibit nonlinear responses, limiting their utility for precise gas concentration monitoring.
- The need for robust, linear sensors is critical in applications requiring consistent performance across a wide range of RI variations.
Purpose of the Study:
- To design a linear, passive refractive index sensor using silicon-on-insulator technology.
- To achieve a constant figure of merit (FOM) for reliable gas sensing across diverse RI changes.
- To enable simplified fabrication for mass production.
Main Methods:
- Utilized a Michelson interferometer integrated with two long Bragg gratings to linearize the sensor response.
- Incorporated slotted Bragg gratings in sensing arms to enhance light-medium interaction.
- Employed finite-difference eigenmode (FDE) and finite-difference time-domain (FDTD) simulations for design validation.
- Fabricated and measured Bragg grating devices and Michelson interferometers to compare with simulation results.
Main Results:
- Achieved a constant figure of merit (FOM) of approximately 113 RIU⁻¹.
- Demonstrated a waveguide sensitivity of ~0.72 with specific design parameters (80 nm slot width, 0.01 index modulation depth).
- Validated the sensor's functionality through experimental measurements and simulations, confirming design principles.
Conclusions:
- The proposed linear RI sensor design offers a constant FOM, crucial for accurate gas concentration monitoring.
- The sensor's design allows for direct air exposure, simplifying fabrication and enabling low-cost production.
- The technology is well-suited for mass production due to its simplified fabrication process and robust performance.

