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    A new asynchronous sampling method eliminates laser interference in MEMS Fourier transform spectrometers. This technique improves signal quality and enables precise spectral measurements for near-infrared applications.

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    Area of Science:

    • Spectroscopy
    • Microelectromechanical Systems (MEMS)

    Background:

    • MEMS-based Fourier Transform Spectrometers (FTS) in the near-infrared (NIR) range often use lasers for real-time mirror position detection.
    • Synchronous acquisition of laser and sample interference signals leads to undesirable optical coupling, compromising data quality.

    Purpose of the Study:

    • To propose and validate an asynchronous equal optical path difference (AEOPD) sampling method.
    • To eliminate optical coupling between the position-sensing laser and the sample signal in MEMS FTS.

    Main Methods:

    • Developed an AEOPD sampling strategy where sample interference signals are acquired only when the position-sensing laser is off.
    • Periodically pulsed the NIR laser for real-time MEMS mirror plate position detection.
    • Implemented and tested the method in an electrothermal MEMS micromirror-based FTS system.

    Main Results:

    • Successfully eliminated laser coupling into the sample signal.
    • Achieved a laser pulse period of up to 12.5 minutes while maintaining spectral repeatability within 0.0005.
    • Demonstrated an increase in the signal-to-noise ratio (SNR) of the FTS measurements.

    Conclusions:

    • The AEOPD sampling method effectively resolves the issue of laser-sample signal coupling in MEMS FTS.
    • This technique enhances spectral accuracy and signal quality for NIR spectroscopy.
    • The proposed method is suitable for future MEMS-based FTS spectrometer development.