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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Reconfigurable electrostatically actuated 1 × 5 rotary MOEMS switch

Navid Heidari, Julian L Pita Ruiz, Seyedfakhreddin Nabavi

    Optics Express
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    PubMed
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