Push-Push Electrothermal MEMS Actuators with Si-to-Si Contact for DC Power Switching Applications

Area of Science:

• Electrical Engineering
• Materials Science
• Mechanical Engineering

Background:

• Micro-Electro-Mechanical Systems (MEMS) switches offer advantages like compact size and high isolation over traditional switches.
• Existing MEMS switches face challenges in reliability and performance for DC power applications.

Purpose of the Study:

• To present a novel silicon-to-silicon (Si-to-Si) MEMS switch with dual suspended chevron actuators for DC power switching.
• To enhance the reliability and performance of MEMS-based DC power switches through a robust silicon design.

Main Methods:

• Fabrication of the Si-to-Si MEMS switch using the PiezoMUMPs process.
• Testing of the fabricated device to evaluate actuation voltage, power consumption, contact resistance, response time, and breakdown voltage.

Main Results:

• The switch achieved contact closure at 1.1 VDC with 246 mW actuation power.
• Demonstrated low contact resistance (~294 ± 2 Ω) and fast response times (4 ms turn-on, 2.5 ms turn-off).
• Withstood a breakdown voltage of up to 376 V across the contact gap.

Conclusions:

• The novel Si-to-Si MEMS switch shows significant potential for high-voltage DC power switching applications.
• The design's robustness and low contact resistance contribute to enhanced reliability.
• Further enhancements can improve performance in demanding environments.