Workflow and Practical Guidance for Identical Location Scanning Electron Microscopy: Reliable Tracking of Localized...

Understanding material transformations at the nano- and microscale is essential for advancing electrocatalysis, energy storage, and other applications. Conventional SEM imaging, which captures random locations before and after treatment, struggles to distinguish real transformations from inherent sample heterogeneity. Identical Location SEM (IL-SEM) overcomes this by enabling re-imaging of the exact same region, offering clear evidence of localized changes in morphology, structure, and composition. Despite its simplicity and wide applicability, IL-SEM remains underutilized. This article presents a detailed, practical guide to implementing IL-SEM reliably, including sample alignment, multiscale imaging, and consistent re-localization. Key methodological tips and solutions to common challenges are provided, making the approach accessible even for non-expert users. To showcase its versatility, we present case studies involving electrocatalysts, alloys, and nanostructured materials. Moreover, by integrating IL-SEM with energy-dispersive spectroscopy (EDS) and electron backscatter diffraction (EBSD), we demonstrate how compositional and crystallographic evolution can be tracked alongside morphological changes. This optimized workflow offers a powerful, non-destructive method for visualizing dynamic material behavior and provides a foundation for IL-SEM to become a standard technique for studying structural evolution across diverse materials research fields.