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Defect Studies in Thin-Film SiO2 of a Metal-Oxide-Silicon Capacitor Using Drift-Assisted Positron Annihilation

Ricardo Helm1, Werner Egger1, Catherine Corbel2

  • 1Institute for Applied Physics and Measurement Technology, University of the Bundeswehr Munich, 85579 Munich, Germany.

Nanomaterials (Basel, Switzerland)
|August 13, 2025
PubMed

Keywords:
drift-enhanced positron annihilation lifetime spectroscopyinterface defectspositron driftpositronium formationthin-films

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