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Synthesis and Performance Characterizations of Transition Metal Single Atom Catalyst for Electrochemical CO2 Reduction
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Single Metal Atom Catalysts Prepared by Diluted Atomic Layer Deposition.
Kai Shen1, Mengjie Fan1, Zhanyuan Liu1
1Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States.
ACS Applied Materials & Interfaces
|August 15, 2025
Summary
Diluted atomic layer deposition (DALD) offers a scalable method for creating single-atom catalysts. This technique precisely controls metal loadings, enabling efficient synthesis for industrial applications.
Area of Science:
- Materials Science
- Catalysis
- Nanotechnology
Background:
- Scalable synthesis of single-atom catalysts is a significant challenge in materials science.
- Current methods often lack precise control over metal loading and precursor utilization.
Purpose of the Study:
- To introduce a novel, scalable, and facile method for synthesizing supported metal catalysts with tunable loadings.
- To demonstrate the synthesis of single-atom catalysts using the new approach.
Main Methods:
- Developed diluted atomic layer deposition (DALD) using a diluted precursor mixture of organometallic precursors and free ligands.
- Applied DALD to synthesize Ir, Rh, and Pt catalysts on γ-Al2O3 supports.
- Controlled metal precursor ratios to tune catalyst structures from nanoparticles to single atoms.
Main Results:
- DALD enables precise control over metal loadings on catalyst supports.
- The method successfully synthesized isolated single-atom catalysts and nanoparticles.
- Demonstrated high efficiency in metal precursor utilization.
Conclusions:
- DALD is a simple, efficient, and scalable strategy for producing supported metal catalysts, including single-atom catalysts.
- This approach facilitates the integration of single-atom catalysts into industrial processes.
- DALD offers precise control over catalyst structure and loading.

