Quantitative mapping of smooth topographic landscapes generated using thermal scanning-probe lithography

Area of Science:

• Materials Science
• Nanotechnology
• Surface Science

Background:

• Scanning probe microscopy (SPM) enables nanoscale surface characterization.
• Thermal scanning-probe lithography (tSPL) precisely sculpts polymer films with nanometer accuracy.
• Standard SPM analysis lacks tools for fitting mathematical functions to complex topographic data.

Purpose of the Study:

• To introduce FunFit, an open-source software package for fitting analytical functions to SPM datasets.
• To develop and demonstrate a fabrication and characterization protocol using tSPL and FunFit.
• To enhance the analysis, reproducibility, and process development for SPM-based nanofabrication.

Main Methods:

• Utilized thermal scanning-probe lithography (tSPL) for nanoscale patterning of polymer resists.
• Employed reactive ion etching to transfer polymer patterns to hexagonal boron nitride (hBN) flakes.
• Applied the FunFit software for artifact correction, analytical function fitting, and comparison of SPM and atomic force microscopy (AFM) data.

Main Results:

• Successfully patterned periodic and quasi-periodic nanoscale landscapes in polymer and hBN.
• Demonstrated high-fidelity pattern transfer from polymer to hBN.
• Validated FunFit's capability in correcting artifacts and fitting datasets, providing feedback for fabrication.

Conclusions:

• The FunFit software and associated protocol significantly improve the analysis and reproducibility of SPM experiments.
• This approach facilitates the creation of sophisticated, mathematically defined nanoscale surfaces for diverse technological applications.
• The protocol is efficient, completable within a working day, making advanced SPM analysis accessible.