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Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
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Intermodal microwave-to-optical transduction using silicon-on-sapphire optomechanical ring resonator
I-Tung Chen1, Nicholas S Yama1, Haoqin Deng1
1Electrical and Computer Engineering Department, University of Washington, Seattle, WA 98105, USA.
Science Advances
|September 10, 2025
Summary
We developed an unsuspended optomechanical ring resonator for efficient quantum microwave-to-optical transduction. This silicon-on-sapphire platform overcomes thermal limitations, enabling scalable quantum systems and advanced optomechanical circuitry.
Area of Science:
- Quantum optics
- Optomechanics
- Solid-state physics
Background:
- Optomechanical and electro-optomechanical systems are key for quantum transduction.
- Suspended designs limit efficiency due to poor heat dissipation.
- Interconnecting quantum modalities requires efficient microwave-to-optical conversion.
Purpose of the Study:
- To demonstrate an unsuspended optomechanical ring resonator (OMR) for microwave-to-optical frequency conversion.
- To address thermal limitations in suspended optomechanical systems.
- To present a silicon-on-sapphire (SOS) platform compatible with superconducting qubits.
Main Methods:
- Fabrication of an unsuspended optomechanical ring resonator on a silicon-on-sapphire platform.
- Utilizing triply resonant optical-to-optical conversion.
- Characterizing enhanced coupling rates and conversion efficiencies under microwave and optical drive powers.
Main Results:
- Achieved an enhanced coupling rate (Gb) of 3.6 GHz/√mW.
- Demonstrated a peak conversion efficiency of 1.2% with 3.6 mW microwave drive power.
- Obtained a microwave-to-optical conversion efficiency of 1.5 × 10⁻⁵ at 10 mW optical drive power.
Conclusions:
- The unsuspended SOS platform effectively mitigates thermal effects.
- This platform is compatible with superconducting qubits, crucial for quantum computing.
- The demonstrated OMR is a promising platform for optomechanical circuitry and quantum transduction.

