Related Experiment Video
Updated: Jan 17, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Versatile Sol-Gel and Inkjet Printing Route for Low-Cost Fabrication of Mesoporous SiO2‑Based Conductive Bridge
Roxane Mamberti1, Evangéline Bènevent1, Minh-Anh Luong2
1Aix Marseille Univ, Université de Toulon, CNRS, IM2NP, Campus Scientifique de St Jérôme, 13013 Marseille, France.
Abstract:
The growing demand for cost-effective nonvolatile memory has driven research into emerging resistive random-access memory (ReRAM) technologies, including conductive bridge random-access memories (CBRAMs). In this work, we investigate the electrical performance of CBRAMs based on mesoporous sol-gel SiO2 electrolytes, fabricated using a cost-effective process combining sol-gel deposition, evaporation-induced self-assembly, and inkjet printing. By varying key fabrication parameters, namely, porosity and electrolyte thickness, we analyze their impact on switching behavior, retention, and endurance. Our findings reveal that mesoporous SiO2 significantly enhances CBRAM performance, offering well-controlled ionic pathways for filament formation and dissolution while keeping the deposition process flexible in terms of deposition parameters. Among the tested configurations, the memory cells based on a moderately porous (20%) and thick (280 nm) SiO2 layer demonstrate the best stability, with minimal SET/RESET voltage variability, strong retention over 28 h, and reliable endurance over 1000 cycles. In contrast, highly porous electrolyte layers lead to greater variability in resistive states due to unstable filament dissolution. These results highlight the potential of mesoporous SiO2-based CBRAMs for next-generation memory applications, particularly in flexible electronics and neuromorphic computing. The study provides key insights into optimizing memory design through electrolyte engineering and scalable, low-cost manufacturing processes.

