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Noise-robust multi-fringe decomposition for high-precision wavefront measurement in dual-lateral shearing

Yating Luo, Dian Bian, Zai Luo

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    Summary

    A new algorithm for dual-lateral shearing interferometry decomposes fringe patterns in a single frame, reducing noise and improving wavefront reconstruction accuracy. This method offers enhanced precision for real-time optical metrology applications.

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    Area of Science:

    • Optical Metrology
    • Interferometry
    • Wavefront Sensing

    Background:

    • Dual-lateral shearing interferometry is crucial for precise optical measurements.
    • Conventional methods struggle with mode aliasing and noise, limiting accuracy.
    • Decomposing superimposed fringe patterns while maintaining phase integrity is a significant challenge.

    Purpose of the Study:

    • To develop a single-frame multi-fringe decomposition algorithm for dual-lateral shearing interferometry.
    • To suppress mode aliasing and reduce interferogram noise.
    • To improve wavefront reconstruction accuracy and computational efficiency.

    Main Methods:

    • A novel single-frame multi-fringe decomposition algorithm was developed.
    • Numerical simulations were conducted to compare performance against conventional methods.
    • Experimental validation was performed using a deformable mirror monitoring system.

    Main Results:

    • The algorithm effectively suppresses mode aliasing and reduces interferogram noise.
    • Wavefront reconstruction errors were significantly reduced compared to conventional methods.
    • Experimental results showed peak-to-valley (PV) error below 0.3 µm and root-mean-square (RMS) error below 0.07 µm, a 55% and 52% improvement, respectively.

    Conclusions:

    • The proposed algorithm offers superior performance in dual-lateral shearing interferometry.
    • It provides high precision and practical advantages for real-time wavefront analysis.
    • The technique is suitable for advanced optical metrology systems requiring efficient and robust measurements.