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Development of high-quality TiO2 photonics with E-gun evaporation
Optics Express
|September 23, 2025
Summary
High-quality titanium dioxide (TiO2) waveguide resonators were fabricated using E-gun evaporation. This method achieved high Q factors and extinction ratios, showing potential for integrated photonics and co-packaged optics.
Area of Science:
- Photonics
- Materials Science
- Nanotechnology
Background:
- Integrated photonics relies on high-quality optical components.
- Titanium dioxide (TiO2) is a promising material for photonic applications due to its optical properties.
- Fabrication methods impact the performance of TiO2-based devices.
Purpose of the Study:
- To demonstrate the fabrication of high-quality (Q) TiO2 waveguide resonators using E-gun evaporation.
- To investigate the performance of TiO2 waveguides with varying confinement.
- To explore the potential of these devices for nonlinear and quantum photonics, and co-packaged optics.
Main Methods:
- Fabrication of TiO2 films and waveguides using E-gun evaporation.
- Characterization of film roughness and waveguide properties.
- Measurement of Q factor for resonators and extinction ratios (ER) for different substrates.
Main Results:
- Achieved TiO2 films with roughness below 1 nm.
- Demonstrated high-Q TiO2 waveguide resonators with Q factor up to 1.1 × 10^5.
- Obtained high ER values: >27.1 dB on silicon and >68.7 dB on glass substrates.
- Investigated both low-confined and high-confined TiO2 waveguides.
Conclusions:
- E-gun evaporation is a viable method for fabricating high-Q, high-ER TiO2 waveguide resonators.
- The developed process enables the creation of highly confined TiO2 photonic waveguides.
- These findings highlight the potential for advanced integrated photonic applications, including co-packaged optics.
