Related Experiment Video
Updated: Jan 17, 2026

Multimodal Hierarchical Imaging of Serial Sections for Finding Specific Cellular Targets within Large Volumes
Published on: March 20, 2018
Enabling the Acquisition of Electron Beam-Induced Current (EBIC) Images in Conventional SEM and STEM Instruments
Fernando Camino1, Byeongjun Gil2,3, Armando Rúa4
1Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA.
Abstract:
Electron beam-induced current (EBIC) imaging is a well-established scanning electron microscope (SEM) technique used to analyze the behavior of microelectronic devices including solar cells. Recently, the application of EBIC imaging in an aberration-corrected scanning transmission electron microscope (STEM) has been demonstrated and offers great potential for the in situ study of electronic materials, correlating charge transport properties to atomic structural and elemental information. This work presents two ways to implement EBIC imaging in conventional SEM and STEM systems: one relying on the instrument's inherent scanning and imaging electronics and the other involving third-party systems usually available in electron microscopes. The implementation of lock-in EBIC in systems equipped with a fast beam blanker is also described. In addition, this work shows and discusses the different mechanisms at play in EBIC imaging and their dependence on beam energy, sample impedance, and electrical measurement configuration, providing researchers with the basic information needed to apply the technique to their research.
Related Concept Videos
Scanning Electron Microscopy
Fundamental Principles
Accelerated...
Preparation of Samples for Electron Microscopy
Overview of Electron Microscopy
Transmission Electron Microscopy
Overview of Microscopy Techniques
Electron Microscope Tomography and Single-particle Reconstruction
Electron Tomography
Electron tomography can be performed either in TEM or STEM (scanning transmission...

