High Transmission Efficiency Hybrid Metal-Dielectric Metasurfaces for Mid-Infrared Spectroscopy

Mid-infrared (MIR) spectroscopy enables non-invasive identification of chemical species by probing absorption spectra associated with molecular vibrational modes, where spectral filters play a central role. Conventional plasmonic metasurfaces have been explored for MIR filtering in reflection and transmission modes but typically suffer from broad spectral profiles and low efficiencies. All-dielectric metasurfaces, although characterized by low intrinsic losses, are largely limited to reflection mode operation. To overcome these limitations, we propose a hybrid metal-dielectric metasurface that combines the advantages of both platforms while simplifying fabrication compared to conventional Fabry-Pérot filters. The proposed filter consists of silicon (Si) crosses atop gold (Au) square patches and demonstrates a transmission efficiency of 87% at the operating wavelength of 4.28 µm, with a full width half maximum (FWHM) as narrow as 43 nm and a quality factor of approximately 99.5 at λ = 4.28 μm. Numerical simulations attribute this performance to hybridization of Mie lattice resonances in both the gold patches and silicon crosses. By providing narrowband, high-transmission filtering in the MIR, the hybrid metasurface offers a compact and versatile platform for selective gas detection and imaging. This work establishes hybrid metal-dielectric metasurfaces as a promising direction for next-generation MIR spectroscopy.