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Development, Design, and Electrical Performance Simulation of Novel Through-Type 3D Semi Spherical Electrode Detector
Zhiyu Liu1,2, Tao Long1,2, Zheng Li1,2
1School of Integrated Circuits, Ludong University, Yantai 264025, China.
Micromachines
|September 27, 2025
Summary
A novel quasi-hemispherical electrode detector with trench electrodes offers spherical-like electrical performance. This design minimizes crosstalk, enhancing X-ray photon counting detectors for high-resolution imaging.
Area of Science:
- Semiconductor device physics
- Photon detection technology
Background:
- Traditional detectors face limitations in resolution and noise.
- Need for advanced detector designs in medical imaging and materials science.
Purpose of the Study:
- Introduce a novel through-type three-dimensional quasi-hemispherical electrode detector.
- Investigate its electrical characteristics and potential applications.
Main Methods:
- Device physics modeling and three-dimensional simulation using Technology Computer-Aided Design (TCAD).
- Analysis of electric field, potential, electron concentration, induced current, and crosstalk.
Main Results:
- Achieved ultra-small capacitance (2.7 fF) and low depletion voltage (1.4 V).
- Demonstrated uniform electric field distribution and minimal crosstalk between units.
- Near-spherical structure exhibits spherical-like electrical performance.
Conclusions:
- The proposed detector design enables electrical isolation of pixel units.
- Suitable for high-resolution X-ray photon counting detectors.
- Enhances contrast-to-noise ratio in low-dose imaging and detection of fine structures.
