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Review of Research Advances in Gyroscopes' Structural Forms and Processing Technologies Viewed from Performance

Hang Luo1, Hongbin Su1, Qiwen Tang1

  • 1Department of Measurement and Control Engineering, School of Mechanical Engineering, Sichuan University, Chengdu 610065, China.

Sensors (Basel, Switzerland)
|October 16, 2025
PubMed
Summary

This review details advancements in microelectromechanical system (MEMS) gyroscope structures and processing technologies. It covers fundamental principles, recent research, error analysis, and challenges for improved inertial sensing applications.

Keywords:
Coriolis forceMEMS gyroscopesdual masshemisphere resonator gyroscopeperformance indicesquadruple mass

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