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Oxidation-Tuned CuOx for Spin-Orbit Torque Efficiency Enhancement.

Che-Jui Li1, Chi-Feng Pai1

  • 1Department of Materials Science and Engineering, National Taiwan University, Taipei 10617, Taiwan.

ACS Applied Materials & Interfaces
|October 21, 2025
PubMed
Summary

Controlled oxidation of copper oxide (CuOx) layers enhances spin-orbit torque (SOT) in spintronic devices. This study shows CuOx as a scalable source for improved damping-like SOT efficiency.

Keywords:
Spin−orbit torqueharmonic Hall voltage measurementorbital Hall effectorbital Rashba−Edelstein effectorbital-to-spin conversion

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Area of Science:

  • Materials Science
  • Condensed Matter Physics
  • Spintronics

Background:

  • Spin-orbit torque (SOT) is crucial for next-generation spintronic devices.
  • Enhancing SOT efficiency requires novel materials and interface engineering.

Purpose of the Study:

  • To investigate oxidation-controlled CuOx layers as orbital current sources for SOT enhancement.
  • To systematically tune CuOx oxidation states and evaluate their impact on SOT efficiency.

Main Methods:

  • Reactive sputtering of CuOx layers with varied oxygen concentrations.
  • Fabrication of CoFeB/Pt heterostructures with CuOx.
  • Harmonic Hall voltage measurements to quantify SOT efficiency.

Main Results:

  • A peak damping-like SOT efficiency of |ξDL| ≈ 0.30 was achieved with 3 nm CuOx and 4 nm Pt, a ~76% enhancement.
  • SOT efficiency showed nonmonotonic dependence on CuOx thickness and optimal Pt thickness around 4 nm.
  • Controlled reactive sputtering yielded stronger and more tunable SOT effects than natural oxidation.

Conclusions:

  • Oxidation-controlled CuOx is an effective source for enhancing damping-like SOT.
  • Scalable CuOx layers offer a promising route for advanced spintronic devices.
  • Interface engineering and oxidation control are key for optimizing SOT performance.