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Oxidation-Tuned CuOx for Spin-Orbit Torque Efficiency Enhancement
1Department of Materials Science and Engineering, National Taiwan University, Taipei 10617, Taiwan.
ACS Applied Materials & Interfaces
|October 21, 2025
Summary
Controlled oxidation of copper oxide (CuOx) layers enhances spin-orbit torque (SOT) in spintronic devices. This study shows CuOx as a scalable source for improved damping-like SOT efficiency.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Spintronics
Background:
- Spin-orbit torque (SOT) is crucial for next-generation spintronic devices.
- Enhancing SOT efficiency requires novel materials and interface engineering.
Purpose of the Study:
- To investigate oxidation-controlled CuOx layers as orbital current sources for SOT enhancement.
- To systematically tune CuOx oxidation states and evaluate their impact on SOT efficiency.
Main Methods:
- Reactive sputtering of CuOx layers with varied oxygen concentrations.
- Fabrication of CoFeB/Pt heterostructures with CuOx.
- Harmonic Hall voltage measurements to quantify SOT efficiency.
Main Results:
- A peak damping-like SOT efficiency of |ξDL| ≈ 0.30 was achieved with 3 nm CuOx and 4 nm Pt, a ~76% enhancement.
- SOT efficiency showed nonmonotonic dependence on CuOx thickness and optimal Pt thickness around 4 nm.
- Controlled reactive sputtering yielded stronger and more tunable SOT effects than natural oxidation.
Conclusions:
- Oxidation-controlled CuOx is an effective source for enhancing damping-like SOT.
- Scalable CuOx layers offer a promising route for advanced spintronic devices.
- Interface engineering and oxidation control are key for optimizing SOT performance.
Keywords:
Spin−orbit torqueharmonic Hall voltage measurementorbital Hall effectorbital Rashba−Edelstein effectorbital-to-spin conversionMore Related Videos
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