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Anderson's negative-U chemistry in amorphous silicon nitride: A complex system approach
Woon Ih Choi1, Bokyeom Kim1, Uihui Kwon1
1Computational Science and Engineering Team, Semiconductor R&D Center, Samsung Electronics, Gyeonggi-do 17113, South Korea.
Science Advances
|October 24, 2025
Summary
Coordination defects in amorphous silicon nitride (a-SiNₓ) act as charge traps, making singly occupied states less favorable. This explains a-SiNₓ
Area of Science:
- Materials Science
- Condensed Matter Physics
- Computational Chemistry
Background:
- The negative-U model describes electron-electron attraction in amorphous materials.
- Amorphous silicon nitride (a-SiNₓ) is crucial for charge storage applications.
Purpose of the Study:
- Investigate the chemical mechanisms behind charge trapping in a-SiNₓ.
- Explain the role of defects in the electronic properties of amorphous silicon nitride.
Main Methods:
- Density Functional Theory (DFT) calculations.
- Structural sampling and quantum-chemical analysis.
- Analysis of coordination defects and bonding networks.
Main Results:
- Coordination defects in a-SiNₓ function as charge traps at high densities (10²¹ cm⁻³).
- Electron donor-acceptor interactions stabilize paired or empty states over singly occupied ones.
- Si-rich a-SiNₓ exhibits power-law distributed Si-Si bonds, correlating with trap depth.
Conclusions:
- Defect-mediated charge trapping explains the electronic behavior of a-SiNₓ.
- Reorganization of chemical bonds influences charge trapping dynamics.
- The findings elucidate a-SiNₓ's utility in charge trap flash memory.
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