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A Novel Asymmetric High-Performance MEMS Pendulum Capacitive Accelerometer
Guangxian Dong1, Jia Jiang2, Weixin Wu1
1Chongqing Academy of Metrology and Quality Inspection, Chongqing 401121, China.
Micromachines
|October 29, 2025
Summary
This study introduces a novel MEMS pendulum accelerometer with asymmetric mass blocks for enhanced sensitivity and stability. Fabricated using silicon and ICP etching, it achieves 1.247 V/g sensitivity and 0.8% nonlinearity.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Sensor Technology
- Inertial Measurement Units
Background:
- Traditional accelerometers face limitations in sensitivity and stability.
- Asymmetric designs in MEMS devices can offer improved performance characteristics.
- The integration of sensitive structures with interface circuits is crucial for practical accelerometer applications.
Purpose of the Study:
- To propose and develop a novel asymmetric Microelectromechanical Systems (MEMS) pendulum accelerometer.
- To enhance both the sensitivity and structural stability of the MEMS accelerometer through an asymmetric mass block design.
- To fabricate and evaluate the performance of the developed MEMS accelerometer and its interface circuit.
Main Methods:
- Design and fabrication of a MEMS sensitive structure utilizing asymmetric mass blocks.
- Utilization of a double-side polished (100) N-type silicon wafer for fabrication.
- Application of Inductively Coupled Plasma (ICP) etching for realizing the sensor structure.
- Development and fabrication of a complementary interface circuit.
- Performance evaluation using a static field roll-over test.
Main Results:
- The asymmetric mass block design significantly improved sensitivity and structural stability.
- Successful fabrication of the MEMS accelerometer and its interface circuit.
- Achieved a high sensitivity of 1.247 V/g.
- Demonstrated low nonlinearity of 0.8% within the -2 g to 2 g measurement range.
Conclusions:
- The novel asymmetric MEMS pendulum accelerometer exhibits excellent performance characteristics.
- The proposed design effectively enhances sensitivity and structural stability.
- The developed sensor is suitable for applications requiring precise acceleration measurement.
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