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Degradation and Damage Effects in GaN HEMTs Induced by Low-Duty-Cycle High-Power Microwave Pulses
Dong Xing1, Hongxia Liu1, Mengwei Su1
1Key Laboratory for Wide Band Gap Semiconductor Materials and Devices of Education Ministry, School of Microelectronics, Xidian University, Xi'an 710071, China.
Abstract:
This study investigates the effects and mechanisms of high-power microwave on GaN HEMTs. By injecting high-power microwave from the gate into the device and employing techniques such as DC characteristics, gate-lag effect analysis, low-frequency noise measurement, and focused ion beam (FIB) cross-sectional inspection, a systematic investigation was conducted on GaN HEMT degradation and failure behaviors under conditions of a low duty cycle and narrow pulse width. Experimental results indicate that under relatively low-power HPM stress, GaN HEMT exhibits only a slight threshold voltage shift and a modest increase in transconductance, attributed to the passivation of donor-like defects near the gate. However, when the injected power exceeds 43 dBm, the electric field beneath the gate triggers avalanche breakdown, forming a leakage path and causing localized heat accumulation, which ultimately leads to permanent device failure. This study reveals the physical failure mechanisms of GaN HEMTs under low-duty-cycle HPM stress and provides important guidance for the reliability design and hardening protection of RF devices.
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