Evaluating metal-organic precursors for focused ion beam-induced deposition through solid-layer decomposition...

Area of Science:

• Materials Science
• Nanotechnology
• Chemistry

Background:

• Modern metal deposition techniques like focused ion/electron beam-induced deposition (FIBID/FEBID) require specific metal-organic precursors.
• Current precursor development involves complex, time-consuming, and expensive testing and chemical analysis.

Purpose of the Study:

• To investigate the response of new metal-organic precursors to ion beam irradiation using supported thick layers.
• To develop a faster and more resource-efficient method for evaluating precursor properties for FIB applications.

Main Methods:

• Irradiation of supported thick layers of metal-organic precursors with an ion beam.
• Analysis of chemical composition and morphology using scanning electron microscopy (SEM) with backscattered electron/energy-dispersive X-ray spectroscopy.
• Application of machine learning techniques for data processing.

Main Results:

• The study provides a comprehensive and rapid examination of precursor decomposition during ion beam irradiation.
• Valuable insights were gained into how precursor composition affects the properties of resulting metal-rich deposits.
• The method allows for effective pre-screening and scoring of potential FIB precursors.

Conclusions:

• The developed method, analyzing solid layers, offers a viable alternative to traditional gas-phase deposition testing.
• This approach significantly reduces the time and resources needed for precursor evaluation.
• The findings can accelerate the development of new precursors for advanced FIB applications.