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Electronic Distance Measuring Instruments01:30

Electronic Distance Measuring Instruments

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Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over...
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Related Experiment Video

Updated: May 6, 2026

Measurement of Tension Release During Laser Induced Axon Lesion to Evaluate Axonal Adhesion to the Substrate at Piconewton and Millisecond Resolution
09:31

Measurement of Tension Release During Laser Induced Axon Lesion to Evaluate Axonal Adhesion to the Substrate at Piconewton and Millisecond Resolution

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Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.

Can Cui1, Xinghui Li1

  • 1Institute of Data and Information (iDI), Tsinghua Shenzhen International Graduate School (SIGS), Tsinghua University, Shenzhen 518055, China.

Sensors (Basel, Switzerland)
|November 13, 2025
PubMed
Summary
This summary is machine-generated.

Precision nanometrology enables measurements from micrometers to meters with nanometer accuracy. This review compares Laser Interferometers, Grating Interferometers, and Time Grating Sensors for advanced applications.

Keywords:
grating interferometerlaser interferometermanufacturingprecision nanometrologytime grating sensor

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Area of Science:

  • Physics
  • Metrology
  • Optical Engineering

Background:

  • Nanometer-level precision displacement metrology is crucial for science and engineering.
  • Macroscopic measurement ranges (micrometers to meters) require high accuracy (0.1 nm to 100 nm).

Purpose of the Study:

  • To provide a comparative overview of key precision nanometrology technologies.
  • To analyze trade-offs between resolution, robustness, and scalability for practical deployment.

Main Methods:

  • Review of Laser Interferometer (LI) principles, progress, and systems.
  • Review of Grating Interferometer (GI) principles, progress, and systems.
  • Review of Time Grating Sensor (TGS) principles, progress, and systems.

Main Results:

  • LI offers traceable, high-resolution measurements.
  • GI provides compact, stable solutions using diffraction gratings.
  • TGS converts spatial displacement to the time domain, enhancing environmental resilience.

Conclusions:

  • Comparative analysis of LI, GI, and TGS performance indicators.
  • Future directions include hybrid architectures and application-driven requirements in precision manufacturing and instrumentation.