Porous GaN: Anion-Specific Electrochemical Etching Mechanisms and Morphological Control
Thom R Harris-Lee1, Ben Thornley1, Jiawei Zhang1
1Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, CB3 0FS, U.K.
ACS Applied Materials & Interfaces
|November 13, 2025
Summary
Researchers explored electrochemical etching (ECE) of porous gallium nitride (GaN), finding that anion composition in etchants controls pore structure. This discovery allows for tailored porous GaN architectures for optoelectronic devices.
Area of Science:
- Materials Science
- Electrochemistry
- Semiconductor Physics
Background:
- Porous gallium nitride (GaN) shows potential for advanced optoelectronic devices.
- The electrochemical etching (ECE) process for creating porous GaN is not fully understood, especially concerning chemical environment effects on pore morphology.
Purpose of the Study:
- To systematically investigate the controlled ECE of n-type GaN.
- To understand the impact of etchant chemistry and pH on pore morphology.
- To explore the role of anionic species in dictating porous structure.
Main Methods:
- Controlled ECE of n-type GaN was performed using various etchant chemicals and pH values.
- Anion compositions within etchant solutions were systematically varied.
- ECE-generated current oscillations were analyzed in correlation with anion equilibria.
Main Results:
- The identity, speciation, and concentration of anionic species were identified as key factors influencing porous morphology.
- Adjusting polyprotic acid concentration and/or adding conjugate salts effectively tuned porous morphology and surface structure.
- ECE current oscillations were found to correlate with dynamic anion equilibria, offering a new mechanistic interpretation.
Conclusions:
- The chemical environment, particularly anionic species, significantly controls porous GaN morphology during ECE.
- Tailoring etchant composition enables precise control over porous GaN structure for specific applications.
- This research provides a pathway for developing optimized, application-specific porous GaN architectures.


