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Updated: Jan 11, 2026

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Secondary electron topographical contrast formation in scanning transmission electron microscopy

Evgenii Vlasov1, Wouter Heyvaert1, Tom Stoops1

  • 1EMAT and NANOlight Center of Excellence, University of Antwerp, Groenenborgerlaan 171, Antwerp, 2020, Belgium.

Ultramicroscopy
|November 15, 2025
PubMed
Summary

Secondary electron (SE) imaging provides surface topography in scanning transmission electron microscopy (STEM). We developed a physical model to interpret SE images, improving reliability and enabling 3D reconstruction.

Keywords:
Electron beam induced currentImage simulationSecondary electron imaging

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