MoS₂ based 2D material photodetector array with high pixel density

Arrays of photodetector-based pixel sensors are ubiquitous in modern devices, such as smart phone cameras, automobiles, drones, laptops etc. Two-dimensional (2D) material-based photodetector arrays are a relevant candidate, especially for applications demanding planar form factors. However, shortcomings in pixel density and prototyping without cross contamination limit technology adoption and impact. Also, while 2D material detectors offer high absorption, graphene's closed bandgap results in undesirably high dark currents. Here, we introduce the experimental demonstration of dense planar photodetector arrays. We demonstrate a micrometer-narrow pitched 2D detector pixels and show this approach's repeatability by verifying performing of a 16-pixel detector array. Such dense and repeatable detector realization is enabled by a novel, selective, contamination-free 2D material transfer system, that we report here in automated operation. The so realized photodetectors responsivity peaks at a high 0.8 A/W. Furthermore, we achieve uniform detector performance via bias voltage tuning calibration to maximize deployment. Lastly, we demonstrate 2D arrayed photodetectors not only on a silicon chip platform but verify array performance on flexible polymer substrates. Densley-arrayed, flat, bendable, and uniform performing photodetector pixels enable emerging technologies in the space where lightweight and reliable performance is required, such as for the smart phone and emerging VR/AR markets, but also for smart gadgets, wearables, and also for size-weight-power-constrained aviation and space platforms.