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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
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Subwavelength grating-assisted silicon nitride edge coupler with relaxed alignment tolerance.
Yoon-Ho Sunwoo1, Woo-Bin Lee1, Yun-Jae Kwon1
1Department of Electronic Engineering, Kwangwoon University, Seoul, 01897, South Korea.
Scientific Reports
|November 19, 2025
Summary
We developed a silicon nitride (SiN) edge coupler using a subwavelength grating (SWG) tri-tip design. This innovation significantly improves alignment tolerance for optical coupling, crucial for practical photonic integration.
Area of Science:
- Photonics and Optical Engineering
- Materials Science
- Nanotechnology
Background:
- Edge couplers are essential for interfacing optical fibers with photonic integrated circuits.
- Conventional edge couplers often suffer from stringent alignment requirements, limiting their practical application.
- Silicon nitride (SiN) is a promising material for photonic integrated circuits due to its low loss and broad transparency window.
Purpose of the Study:
- To propose and demonstrate a novel silicon nitride (SiN) edge coupler with enhanced alignment tolerance.
- To improve the ease of packaging and integration of SiN photonic devices.
- To achieve efficient optical coupling with relaxed alignment sensitivity.
Main Methods:
- Integration of a subwavelength grating (SWG) tri-tip structure into a SiN edge coupler.
- Design of intermediate bridge waveguides for adiabatic mode transitions.
- Fabrication and characterization of the proposed edge coupler at 1550 nm wavelength.
- Coupling with standard SMF-28 optical fiber.
Main Results:
- Achieved a 1-dB horizontal alignment tolerance of ±3 μm with SMF-28 fiber.
- Measured coupling efficiency of -3.8 dB/facet.
- Demonstrated significantly wider horizontal tolerance compared to conventional single-tip inverse-tapered edge couplers.
- Validated the effectiveness of the SWG tri-tip design in expanding the input acceptance region.
Conclusions:
- The proposed SWG tri-tip SiN edge coupler effectively enhances alignment tolerance while maintaining high coupling efficiency.
- The design is suitable for practical packaging and integration in SiN photonic platforms.
- This advancement contributes to the development of more robust and user-friendly photonic devices.

