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The Research on Multi-Process Collaborative Manufacturing and Characterization Methods of Micro-Nano-Composite
Shibo Xu1, Shaobo Ge1, Zehua Sun1
1Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, School of Optoelectronic Engineering, Institute for Interdisciplinary and Innovation Research, Xi'an Technological University, Xi'an 710021, China.
Nanomaterials (Basel, Switzerland)
|November 26, 2025
Summary
This study presents a novel fabrication method for silicon micro-nano-composite structures, overcoming alignment and material challenges. The technique ensures high precision and stability for advanced photonic devices.
Area of Science:
- Materials Science
- Nanotechnology
- Photonics Engineering
Background:
- Manufacturing micro-nano-composite structures faces challenges with alignment errors and material mismatch.
- Existing methods struggle with precision and scalability for complex architectures.
Purpose of the Study:
- To develop a high-precision fabrication strategy for silicon-based micro-nano-composite layered structures.
- To address alignment errors and material mismatch in micro-nano-composite manufacturing.
- To enable scalable production of advanced photonic devices.
Main Methods:
- Integrated workflow combining electron beam lithography (EBL), inductively coupled plasma (ICP) etching, and ultraviolet nanoimprint lithography (NIL).
- Structural characterization using scanning electron microscopy (SEM) and atomic force microscopy (AFM) with probe convolution correction.
- Fabrication of silicon-based structures with micron-scale platforms and integrated nanopillars.
Main Results:
- Achieved exceptional precision and efficiency in producing complex micro-nano-composite architectures.
- Demonstrated outstanding stability and uniformity with minimal feature size and spatial layout deviations.
- Successfully integrated 50-200 nm diameter nanopillars onto 1-µm platforms with <5% lateral deviation for 50 nm features.
- Mitigated thermal stress-induced misalignment in multi-material layers.
Conclusions:
- Established a robust and versatile pathway for precise manufacturing and characterization of micro-nano-composite structures.
- The method shows strong potential for scalable production of advanced photonic devices and integrated nanophotonic systems.
- Provides a key foundation for next-generation photonic integration technologies.
