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Related Experiment Video

Updated: Jan 10, 2026

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Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator.

Tom Vanackere1,2, Artur Hermans3,4, Ian Christen5

  • 1Massachusetts Institute of Technology, Cambridge, MA, USA. tomvac96@mit.edu.

Nature Communications
|November 26, 2025
PubMed
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This summary is machine-generated.

We developed a scalable silicon nitride modulator for precise optical control of quantum systems. This high-speed technology enables large-scale coherent manipulation of atoms and ions.

Area of Science:

  • Quantum optics
  • Materials science
  • Nanotechnology

Background:

  • Coherent optical control of atomic quantum systems requires advanced light modulation.
  • Existing technologies face limitations in scalability and speed for applications like cold atoms and ions.

Purpose of the Study:

  • To introduce a novel, scalable modulator technology for large-scale coherent optical control.
  • To meet the stringent requirements of quantum information processing and atomic physics.

Main Methods:

  • Fabrication of piezoelectrically actuated silicon nitride resonant waveguide gratings.
  • Utilized 200 mm silicon wafers with CMOS-compatible processes for scalability.
  • Developed a 4x4 array of individually addressable pixels (50μm x 50μm).

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Last Updated: Jan 10, 2026

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Main Results:

  • Demonstrated a proof-of-concept device with high-speed modulation capabilities (>100 MHz).
  • Achieved a spectral response with >20 dB extinction at a ~780 nm design wavelength.
  • The technology is compatible with large-scale wafer fabrication.

Conclusions:

  • The developed modulator technology offers a scalable solution for advanced quantum control.
  • This innovation paves the way for new discoveries in atomic quantum systems and quantum technologies.
  • High-speed, large-scale optical modulation is now feasible for demanding quantum applications.