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Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator
Tom Vanackere1,2, Artur Hermans3,4, Ian Christen5
1Massachusetts Institute of Technology, Cambridge, MA, USA. tomvac96@mit.edu.
Nature Communications
|November 26, 2025
Summary
We developed a scalable silicon nitride modulator for precise optical control of quantum systems. This high-speed technology enables large-scale coherent manipulation of atoms and ions.
Area of Science:
- Quantum optics
- Materials science
- Nanotechnology
Background:
- Coherent optical control of atomic quantum systems requires advanced light modulation.
- Existing technologies face limitations in scalability and speed for applications like cold atoms and ions.
Purpose of the Study:
- To introduce a novel, scalable modulator technology for large-scale coherent optical control.
- To meet the stringent requirements of quantum information processing and atomic physics.
Main Methods:
- Fabrication of piezoelectrically actuated silicon nitride resonant waveguide gratings.
- Utilized 200 mm silicon wafers with CMOS-compatible processes for scalability.
- Developed a 4x4 array of individually addressable pixels (50μm x 50μm).
Main Results:
- Demonstrated a proof-of-concept device with high-speed modulation capabilities (>100 MHz).
- Achieved a spectral response with >20 dB extinction at a ~780 nm design wavelength.
- The technology is compatible with large-scale wafer fabrication.
Conclusions:
- The developed modulator technology offers a scalable solution for advanced quantum control.
- This innovation paves the way for new discoveries in atomic quantum systems and quantum technologies.
- High-speed, large-scale optical modulation is now feasible for demanding quantum applications.
