Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Corrigendum to "The current situation of intensive care units in Chinese mainland: A nationwide survey" [Journal of Intensive Medicine volume 2 (2026) 132-140].

Journal of intensive medicine·2026
Same author

Reinforcement learning recommends early vasopressin in septic shock: Implications of the OVISS study.

Journal of intensive medicine·2026
Same author

High-Redox-Potential p-Type Covalent Organic Frameworks With Abundant Active Sites for High-Voltage and Long-Life Lithium-Ion Battery Cathodes.

Angewandte Chemie (International ed. in English)·2026
Same author

Timing-dependent renal protection of dapagliflozin in endotoxemic diabetic mice by real-time GFR and biomarkers.

Intensive care medicine experimental·2026
Same author

Novel Phenotypes of Acute Respiratory Failure and Differential Response to Awake Prone Positioning: A Multi-Cohort Study.

MedComm·2026
Same author

Differential Expression of Apoptosis-Stimulating Proteins of p53 (ASPPs) Between Langerhans Cell Histiocytosis and Langerhans Cell Sarcoma.

Diagnostics (Basel, Switzerland)·2026

Related Experiment Video

Updated: Jan 10, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
11:08

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Published on: November 30, 2012

19.4K

Fabrication Process Research for Silicon-Waveguide-Integrated Cavity Optomechanical Devices Using Magnesium Fluoride

Chengwei Xian1,2, Pengju Kuang1, Ning Fu1

  • 1School of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu 611731, China.

Micromachines
|November 27, 2025
PubMed
Summary

A new magnesium fluoride (MgF2) protective layer prevents silicon oxide (SiO2) etching during fabrication of optomechanical devices. This method successfully protects long silicon waveguides, improving production yields for high-precision sensing applications.

Keywords:
SOI micromachininghydrofluoric acid etchingintegrated silicon waveguidemagnesium fluorideselective protection

More Related Videos

Fabrication of Silica Ultra High Quality Factor Microresonators
07:51

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

16.8K
Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques
06:27

Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

Published on: July 2, 2018

8.5K

Related Experiment Videos

Last Updated: Jan 10, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
11:08

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Published on: November 30, 2012

19.4K
Fabrication of Silica Ultra High Quality Factor Microresonators
07:51

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

16.8K
Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques
06:27

Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

Published on: July 2, 2018

8.5K

Area of Science:

  • Photonics and Microelectromechanical Systems (MEMS)
  • Materials Science for Integrated Devices

Background:

  • Integrated silicon-waveguide-based cavity optomechanical devices are crucial for high-precision sensing.
  • Fabrication challenges arise from the susceptibility of the silicon oxide (SiO2) layer to etching during hydrofluoric acid (HF) release of microstructures.
  • This etching leads to waveguide collapse and reduced production yields.

Purpose of the Study:

  • To address the critical challenge of long-range waveguide collapse during hydrofluoric acid (HF) etching in optomechanical device fabrication.
  • To propose and validate a novel selective protection process for silicon oxide (SiO2) layers.

Main Methods:

  • A selective protection process utilizing a magnesium fluoride (MgF2) thin film was developed.
  • MgF2 protective layers were deposited over waveguide regions using optical coating technology.
  • Localized protection of specific SiO2 areas during HF etching was achieved.

Main Results:

  • The MgF2 protective layer successfully prevented SiO2 etching during HF release.
  • Silicon waveguides with lengths up to 5000 μm were successfully released.
  • A significant improvement in production yield for optomechanical devices was demonstrated.

Conclusions:

  • The MgF2 selective protection process is a compatible and efficient strategy for fabricating robust photonic-microelectromechanical integrated devices.
  • This method overcomes critical fabrication challenges, enabling the production of high-performance optomechanical sensors.
  • The study provides a viable solution for improving yields in integrated photonics manufacturing.