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Close-to-atom scale precision measurement and manufacturing via near-field optics

Peng-Yi Feng1, Benfeng Bai1, Hong-Bo Sun1

  • 1State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.

Science Bulletin
|November 28, 2025
PubMed
Abstract

No abstract available in PubMed .

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