Impact of Arsenic- and Indium-Terminated InGaAs Stressors on Carrier Confinement, Strain, Defects, and Transport
Sengunthar Karthikeyan1, Rishav Khatiwada2, Jean J Heremans2
1Advanced Devices & Sustainable Energy Laboratory (ADSEL), Bradley Department of Electrical and Computer Engineering, Virginia Tech, Blacksburg, Virginia 24061, United States.
Abstract:
Device-quality tensile-strained Ge (ε-Ge) grown on a large bandgap semiconductor with superior electrical and optical carrier confinement is essential for group-IV-based optoelectronics. Properties of ε-Ge active layers synthesized on In0.24Ga0.76As buffers with two different surface terminationsarsenic-rich and indium-richwere experimentally demonstrated, highlighting the factors not considered in theoretical calculations. High-resolution X-ray diffraction and Raman spectroscopy analyses of these ε-Ge/In0.24Ga0.76As heterostructures confirmed the fully strained (1.6%) and partially relaxed (0.82%) nature of the ε-Ge bonded with arsenic-terminated (GeAs‑terminated) and indium-terminated (GeIn‑terminated) In0.24Ga0.76As stressors, respectively. High-resolution cross-sectional transmission electron microscopy showed a coherent, sharp, and fully strained ε-Ge/In0.24Ga0.76As heterointerface in the GeAs‑terminated heterostructure, whereas microtwin defects were present in the GeIn‑terminated heterostructure. These heterostructures were further characterized by evaluating the minority carrier lifetimes, high for GeAs‑terminated (525 ns) and low for GeIn‑terminated (69 ns), using the photoconductive decay technique. Moreover, band alignment was constructed using X-ray photoelectron spectroscopy, where the GeAs‑terminated heterostructure revealed that both holes and electrons were confined within the ε-Ge active layer as a type-I band alignment with ΔE V, As‑terminated = 0.22 eV and ΔE C,As‑terminated = 0.38 eV. On the other hand, the GeIn‑terminated heterostructure exhibited a type-II band alignment with ΔE V,In‑terminated = - 0.02 eV and ΔE C,In‑terminated = 0.53 eV. Furthermore, the magnetotransport properties revealed high mobility (321 cm2/(V s)) with single-electron transport in GeAs‑terminated heterostructure and low mobility (3.34 cm2/(V s)) with multihole transport in the GeIn‑terminated heterostructure. Therefore, preferring the ε-Ge on the arsenic-rich surface of In0.24Ga0.76As stressor over the indium-rich surface during material synthesis offers device-quality materials with high carrier lifetime and superior carrier confinement, which can provide an opportunity to fabricate efficient group-IV-based optoelectronic devices.
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