Nondestructive Imaging and Quantification of Composition in 2D MoS₂ and V‑Doped MoS₂ by the Auger Scatterplot Method

Area of Science:

• Materials Science
• Surface Science
• Nanotechnology

Background:

• Molybdenum disulfide (MoS₂) monolayers are promising 2D materials with properties dependent on surface composition.
• Accurate surface characterization is crucial for understanding MoS₂ properties.
• Auger electron spectroscopy (AES) is a standard technique but suffers from beam damage and spectral variations.

Purpose of the Study:

• To develop a nondestructive method for characterizing MoS₂ and V-doped MoS₂ 2D surfaces.
• To overcome limitations of traditional AES, such as beam-induced damage.
• To assess elemental distributions and identify S-rich/depleted regions.

Main Methods:

• Correlative analysis using Auger scatterplots.
• Examination of MoS₂ and V-doped MoS₂ 2D surfaces.
• Supportive analysis with Raman spectroscopy and transmission electron microscopy.

Main Results:

• Auger scatterplots enable nondestructive imaging of elemental lateral and depth distributions.
• V doping in MoS₂ was found to retard desulfurization in Ar/H₂ plasma.
• The scatterplot technique improved AES accuracy by up to 30% by reducing electron dose.
• Quantitative relationships revealed affinities between surface constituents.

Conclusions:

• Auger scatterplots provide a powerful, nondestructive tool for analyzing 2D material surfaces.
• The method enhances AES accuracy and offers insights into surface composition and doping effects.
• Auger scatterplots correlate with photoluminescence, indicating potential for practical applications in 2D materials.