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Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Band-hybridized selenium contact for p-type semiconductors.
Cong Wang1,2, Jianmiao Guo1,2, Dexing Liu1,3
1Department of Applied Physics, The Hong Kong Polytechnic University, Hong Kong, China.
Researchers developed a new ultrathin selenium interfacial layer for low-resistance electrical contacts in p-type semiconductors. This method significantly reduces contact resistance in devices like WSe2 transistors, paving the way for improved nanoscale electronics.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Achieving low-resistance electrical contacts to p-type 2D semiconductors is challenging due to metal-induced gap states.
- While semimetals like bismuth work for n-type semiconductors, a similar solution for p-type materials is needed.
- High work function interfacial layers are crucial for reducing Schottky barrier height.
Purpose of the Study:
- To develop a novel interfacial layer for ultralow contact resistance in p-type 2D semiconductors.
- To investigate the mechanism of band hybridization at the metal-semiconductor interface.
- To demonstrate the effectiveness of the proposed method in p-type WSe2 transistors.
Main Methods:
- Introduction of an ultrathin selenium (Se) interfacial layer with a high work function.
- Formation of a band-hybridized semimetallic contact through interaction between Se and a gold electrode.
- Fabrication and characterization of p-type WSe2 field-effect transistors with the new contact.
Main Results:
- The Se interfacial layer effectively reduced the Schottky barrier height.
- Band hybridization transformed the semiconductor interface into a semimetallic one, suppressing metal-induced gap states.
- Contact resistance in p-type WSe2 transistors was reduced to 540 Ω μm.
- High ON-state current density of 430 μA μm⁻¹ was achieved with an 80-nm channel length.
Conclusions:
- The Se interfacial layer provides a scalable pathway for ultralow-resistance contacts to p-type semiconductors.
- This band-hybridized semimetallic contact strategy is transferable to other p-type materials like black phosphorus and carbon nanotubes.
- The findings enable advancements in high-performance nanoscale electronic devices.
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