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Self-aligned imprint lithography process for fabricating indium-gallium- zinc-oxide thin film transistor arrays

Chang-Yun Na1, Changjun No1, Sung Min Cho2

  • 1School of Chemical Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea.

Scientific Reports
|December 8, 2025
PubMed
Abstract

No abstract available in PubMed .

Keywords:
Imprint processPlasma etchingSelf-aligned imprint lithography (SAIL)a-IGZO TFT array

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