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Related Experiment Video

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Blood Flow Imaging with Ultrafast Doppler
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High frame rate ultrasonic flowmeter based on PMUT array with bidirectional acoustic beams.

Yufeng Gao1, Xili Wang1,2, Lei Zhao3

  • 1School of Integrated Circuits, Peking University, Beijing, China.

Microsystems & Nanoengineering
|December 9, 2025
PubMed
Summary

This study introduces a novel piezoelectric micromachined ultrasonic transducer (PMUT) array for enhanced ultrasonic flowmeters. The V-shaped acoustic beam pattern enables faster, one-step bidirectional flow rate measurements.

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Area of Science:

  • Ultrasound technology
  • Acoustic engineering
  • Fluid dynamics

Background:

  • Traditional ultrasonic flowmeters face frame rate limitations due to sequential upstream/downstream time-of-flight (ToF) measurements.
  • Existing methods often require paired transducers operating alternately, increasing complexity and reducing efficiency.

Purpose of the Study:

  • To demonstrate a miniaturized piezoelectric micromachined ultrasonic transducer (PMUT) array capable of generating a symmetric V-shaped acoustic beam pattern.
  • To enable synchronous, bidirectional ultrasonic signal transmission for improved flow rate monitoring.
  • To overcome the frame rate limitations of conventional time-of-flight (ToF) ultrasonic flowmeters.

Main Methods:

  • A 5-channel, ~250 kHz PZT PMUT phased array (3.6 mm × 3.6 mm) was designed to generate a V-shaped bidirectional beam.
  • Optimized array pitch and sequential control were employed to utilize grating lobes, creating dual main lobes at 27° and 153°.
  • Installation geometry was optimized for enhanced ToF resolution and adaptability to various pipe configurations, including straight and zigzag designs.

Main Results:

  • The PMUT array achieved a remarkable frame rate, enabling 1000 upstream and downstream ToF measurements per second.
  • High-performance flow rate monitoring was demonstrated with a large range (0.5-35 L·min⁻¹), high resolution (185 ns/(L·min⁻¹)), and excellent linearity (0.997).
  • The system successfully measured airflow in both conventional straight and optimized zigzag pipes.

Conclusions:

  • The developed PMUT array offers a promising one-step, mid-air flow rate measurement solution.
  • This technology significantly enhances frame rates and performance compared to traditional ultrasonic flowmeters.
  • The V-shaped beam pattern and optimized array design present a potential advancement for future flow monitoring applications.