Information advantage in sensing revealed by Fano-resonant Fourier scatterometry

Nick Feldman1,2, Arie J den Boef2,3,4, Lyubov V Amitonova2,3

  • 1Department of Information in Matter and Center for Nanophotonics, AMOLF, Amsterdam, The Netherlands.

Nature Communications
|December 10, 2025
PubMed
Summary

Angle-resolved scattering analysis of Fano resonant nanostructures offers superior sensing capabilities compared to traditional spectral shift measurements. This Fourier scatterometry approach provides greater information content for detecting minute perturbations.

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