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High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure
Wanqing Zuo1, Xiyu Gu2,3, Tingting Yang2,3
1Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Hong Kong, China.
Sensors (Basel, Switzerland)
|December 11, 2025
Summary
This study presents a novel force sensor using a solid mounted resonator (SMR) with a high resonance frequency. The device demonstrates a high sensitivity of 37.79 MHz/N for precise load detection in industrial applications.
Area of Science:
- Materials Science
- Electrical Engineering
- Mechanical Engineering
Background:
- Bulk acoustic wave (BAW) resonators are crucial for high-frequency sensing due to their performance.
- Solid mounted resonators (SMRs) offer high resonance frequencies and quality factors for advanced applications.
Purpose of the Study:
- To fabricate and characterize a force sensor utilizing a solid mounted resonator (SMR) structure.
- To investigate the operational mechanism and sensitivity of the SMR-based force sensor.
Main Methods:
- Fabrication of an SMR device operating at a resonance frequency of 2.257 GHz.
- Application of external loads to induce mechanical deformation and compressive stress in the piezoelectric layer.
- Measurement of resonance frequency shifts in response to applied loads.
Main Results:
- A deterministic correlation between resonance frequency shift and applied load was established.
- The SMR force sensor achieved a high sensitivity of 37.79 MHz/N.
- The applied strain modified elastic and piezoelectric constants, affecting acoustic velocity and electromechanical coupling.
Conclusions:
- The developed SMR force sensor exhibits high sensitivity and robust performance.
- The device shows significant potential for applications in complex industrial fields requiring precise force measurement.
