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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical

Yuhao Xiao1,2,3, Chengliang Sun1, Sheng Liu4,5

  • 1School of Integrated Circuits, Wuhan University, Wuhan, 430072, Hubei Province, China.

Microsystems & Nanoengineering
|March 13, 2026
PubMed

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