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Related Experiment Video

Updated: Jan 9, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

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High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure.

Wanqing Zuo1, Xiyu Gu2,3, Tingting Yang2,3

  • 1Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Hong Kong, China.

Sensors (Basel, Switzerland)
|December 11, 2025
PubMed
Summary

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Sub-6 GHz acoustic filters using laterally-excited bulk acoustic resonator with scattering vias in double-layer electrodes.

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Microbiology spectrum·2026
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Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators.

Microsystems & nanoengineering·2026
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Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment.

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Investigation of Polarity Reversal of Bilayer AlN/Sc<sub>0.2</sub>Al<sub>0.8</sub>N Films and Its Influence on Film Bulk Acoustic Resonators.

Small methods·2025

This study presents a novel force sensor using a solid mounted resonator (SMR) with a high resonance frequency. The device demonstrates a high sensitivity of 37.79 MHz/N for precise load detection in industrial applications.

Area of Science:

  • Materials Science
  • Electrical Engineering
  • Mechanical Engineering

Background:

  • Bulk acoustic wave (BAW) resonators are crucial for high-frequency sensing due to their performance.
  • Solid mounted resonators (SMRs) offer high resonance frequencies and quality factors for advanced applications.

Purpose of the Study:

  • To fabricate and characterize a force sensor utilizing a solid mounted resonator (SMR) structure.
  • To investigate the operational mechanism and sensitivity of the SMR-based force sensor.

Main Methods:

  • Fabrication of an SMR device operating at a resonance frequency of 2.257 GHz.
  • Application of external loads to induce mechanical deformation and compressive stress in the piezoelectric layer.
  • Measurement of resonance frequency shifts in response to applied loads.
Keywords:
AlN/AlScN composite filmload sensorpiezoelectric thin filmsolidly mounted resonator (SMR)

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Last Updated: Jan 9, 2026

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Main Results:

  • A deterministic correlation between resonance frequency shift and applied load was established.
  • The SMR force sensor achieved a high sensitivity of 37.79 MHz/N.
  • The applied strain modified elastic and piezoelectric constants, affecting acoustic velocity and electromechanical coupling.

Conclusions:

  • The developed SMR force sensor exhibits high sensitivity and robust performance.
  • The device shows significant potential for applications in complex industrial fields requiring precise force measurement.