High-precision reconstruction of complex discontinuous specular in PMD based on parallel single-pixel

Area of Science:

• Optical metrology
• Surface characterization
• 3D imaging

Background:

• Phase measurement deflectometry (PMD) is a standard technique for specular surface analysis.
• Mixed reflections from specular discontinuities introduce significant errors in phase extraction and slope calculation.
• Existing methods struggle with accurate reconstruction of complex and discontinuous surfaces.

Purpose of the Study:

• To introduce parallel single-pixel imaging (PSI) for high-precision reconstruction of complex and discontinuous specular surfaces.
• To address the limitations of PMD in handling mixed reflections.
• To improve the accuracy and detail preservation in 3D surface metrology.

Main Methods:

• Utilized parallel single-pixel imaging (PSI) to effectively separate mixed reflected light components.
• Selected dominant reflection components for accurate slope calculation.
• Employed a radial basis functions (RBF) based integration method for 3D surface shape reconstruction.

Main Results:

• PSI successfully separated mixed reflections from discontinuous specular surfaces.
• The RBF integration method reduced error propagation during reconstruction.
• Achieved micron-level measurement accuracy for complex specular surfaces.

Conclusions:

• PSI offers a robust solution for overcoming mixed reflection challenges in specular surface metrology.
• The combined PSI and RBF approach enables detailed and accurate 3D reconstruction of complex surfaces.
• This technology advances the capability for high-precision measurement of challenging optical components.