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Energy-resolved EBSD using a monolithic direct electron detector.

Nicolò M Della Ventura1, Kalani Moore2, McLean P Echlin1

  • 1Materials Department, University of California Santa Barbara, Santa Barbara, CA, USA.

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Summary
This summary is machine-generated.

This study quantifies backscattered electron (BSE) energies in electron backscatter diffraction (EBSD) patterns. Our new method reveals how BSE energy impacts pattern clarity and crystallographic measurements.

Keywords:
Direct electron detectionElectron backscatter diffractionElectron countingEnergy filteringEnergy measurement

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Area of Science:

  • Materials Science
  • Solid State Physics
  • Electron Microscopy

Background:

  • Accurate quantification of backscattered electron (BSE) energy distribution in electron backscatter diffraction (EBSD) patterns is a persistent challenge.
  • Understanding BSE energy is crucial for interpreting diffraction contrast and enhancing measurement precision.

Purpose of the Study:

  • To introduce and validate an energy-resolved EBSD methodology for quantifying individual BSE energies within diffraction patterns.
  • To investigate the influence of BSE energy on EBSD pattern quality and crystallographic information.

Main Methods:

  • Utilized a monolithic active pixel sensor direct electron detector and an electron-counting algorithm for energy-resolved EBSD.
  • Calibrated the detector response against primary beam energy and performed measurements on Si(100) with a 12 keV beam.
  • Employed Monte Carlo simulations for comparison and analyzed pixel-resolved energy maps.

Main Results:

  • Observed a broad BSE energy distribution (down to 3 keV) with angular dependence, matching simulations.
  • Identified modulations at Kikuchi band edges and demonstrated significant pattern enhancement using energy filtering.
  • Found that BSEs in the 9-10 keV range are key for Kikuchi pattern formation, but lower energy BSEs (2-8 keV) also contribute.

Conclusions:

  • The developed energy-resolved EBSD method enables single-electron energy determination, expanding quantitative EBSD capabilities.
  • This technique offers potential for deeper understanding of diffraction contrast mechanisms and improved crystallographic measurements.