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High-throughput thickness analysis of 2D materials enabled by intelligent image segmentation.

Jun Chen Ng1,2, Farina Muhamad2, Pauline Shan Qing Yeoh2

  • 1School of Materials Science and Engineering, Peking University, Beijing 100871, China. khinwee.lai@um.edu.my.

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Summary

An AI pipeline estimates 2D material thickness from optical microscopy images, overcoming Atomic Force Microscopy limitations. This AI model offers a faster, non-destructive method for precise thickness measurement.

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Area of Science:

  • Materials Science
  • Optical Physics
  • Artificial Intelligence

Background:

  • Thickness characterization of 2D materials is crucial for understanding their properties.
  • Existing methods like Atomic Force Microscopy (AFM) have significant limitations including slow speed and artifacts.
  • A faster, more efficient, and non-destructive method is needed for 2D material thickness measurement.

Purpose of the Study:

  • To develop an Artificial Intelligence (AI)-based pipeline for estimating 2D material thickness using Optical Microscopy (OM) images.
  • To compare the performance of different AI models and segmentation techniques for thickness prediction.
  • To validate the generalizability and identify key features for thickness estimation.

Main Methods:

  • Utilized optical microscopy images and paired Atomic Force Microscopy (AFM) data for training AI models.
  • Employed Otsu's thresholding and Cellpose for region of interest (ROI) segmentation.
  • Trained regression models, including Random Forest Regressor (RFR) and Multi-Layer Perceptron (MLP), on extracted morphological and colour features.
  • Applied Shapley Additive Explanations (SHAP) for feature importance analysis.

Main Results:

  • The AI pipeline accurately estimated 2D material thickness from OM images.
  • The Multi-Layer Perceptron (MLP) model with automated Cellpose segmentation achieved high predictive performance (R² = 0.947).
  • Statistical analysis confirmed the model's generalizability across different segmentation methods.
  • SHAP analysis identified red and green light intensities as key predictors, consistent with thin-film interference theory.

Conclusions:

  • The proposed AI-based pipeline offers a robust, efficient, and non-destructive alternative to AFM for 2D material thickness measurement.
  • The model demonstrates high accuracy and generalizability, even with small datasets.
  • This approach enables precise and continuous thickness estimation, advancing 2D material characterization.