High-Performance and Thermally Robust A₁-Mode Lamb Wave Resonators on Bonded LiNbO₃/SiC Membranes

In radiofrequency filters, there is an increasing demand for high-frequency, wide-bandwidth operation. Recently, laterally excited A₁-mode Lamb wave resonators (XBARs) have attracted significant attention; however, freestanding structures are mechanically fragile, limiting their practical implementation. To address this challenge, a novel bonded membrane structure consisting of a lithium niobate (LiNbO₃; LN) thin plate supported by a silicon carbide (SiC) layer is proposed to realize high-frequency, high-performance, and thermally robust acoustic resonators. Finite element simulations were performed to analyze the excitation and propagation of A₁-mode Lamb waves in the LN/SiC membrane, clarifying the distinct behavior compared with XBARs. The influence of the bonded SiC thin layer on A₁-mode Lamb waves was systematically evaluated in terms of coupling coefficient and phase velocity, and design guidelines were established based on these insights. A fabricated LN/SiC resonator with an interdigital electrode pitch of 12 µm exhibited a clear A₁-mode response near 1.2 GHz, showing an effective electromechanical coupling coefficient of 24% and a phase velocity exceeding 14,000 m/s. These results demonstrate the feasibility of the bonded LN/SiC membrane as a promising platform for high electromechanical coupling, high-speed, and thermally stable acoustic devices.