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Updated: Jan 7, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy

Picometer-Precision Atomic Position Tracking through Electron Microscopy

Published on: July 3, 2021

Lateral deflection-based optimization achieves sub-picometer detection limit.

Qihai Jiang¹, Baoshi Qiao^1,2, Xiaolei Ding¹

¹ZJU-UIUC Institute, International Campus, Zhejiang University, Haining, 314400, China.

Microsystems & Nanoengineering

|December 31, 2025

Summary

This summary is machine-generated.

Researchers developed a new method for highly sensitive nanoscale displacement measurement using a tilted atomic force microscopy (AFM) probe. This technique achieves sub-picometer precision, enhancing characterization of materials and devices.

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Area of Science:

Nanotechnology
Materials Science
Physics

Background:

Sub-picometer precision displacement measurement is crucial for advanced techniques like scanning Joule expansion microscopy (SJEM).
Current methods often rely on specialized and costly atomic force microscopy (AFM) probes, limiting accessibility and increasing complexity.

Purpose of the Study:

To propose and demonstrate a generalized, cost-effective strategy for high-sensitivity displacement detection at the nanoscale.
To enhance the displacement resolution in techniques such as SJEM.

Main Methods:

Exploiting the torsional response of a tilted AFM probe to amplify deformation signals.
Implementing a generalized strategy adaptable to various AFM-based characterization techniques.

Main Results:

Achieved a record-breaking displacement resolution of 0.37 picometers (pm).
Enhanced measurement sensitivity by nearly an order of magnitude.
Demonstrated flexible adjustment of sensitivity and decoupling of in-plane and out-of-plane displacements.

Conclusions:

Established a transferable, AFM-based strategy for high-sensitivity displacement detection.
Provides valuable guidance for nanoscale characterization and analysis of materials and devices.
Offers a more accessible and less complex alternative to specialized AFM probes.