Application and performance of the novel Elcomat 5000 autocollimator in slope-measuring profilometry of beamline...

Autocollimators are used in profilometers for the precise form measurement of beam-shaping optics for synchrotron light sources and x-ray free-electron lasers. This application requires using an aperture stop, typically 2.5 mm in diameter, which limits the footprint of the autocollimator's measuring beam on the optics to achieve a sufficiently high lateral resolution. Central to the development of profilometry has been the availability of commercial autocollimators, such as the Elcomat 3000 from Möller-Wedel Optical. Although autocollimators are generally not designed for use with small apertures, this device has proven capable and has become the de facto standard. Now that it has been replaced by the Elcomat 5000, we evaluate the performance of several autocollimators of this type at small apertures, including the characterization of instrument transfer functions with a chirped height profile. We demonstrate that the Elcomat 5000 is capable of repeatable angle measurements with a standard deviation of 0.014 arcsec at an aperture diameter of 1.6 mm, whereas the Elcomat 3000 achieves 0.03 arcsec at 2.5 mm, comparing models with modified reticle designs. We also investigate the influence of optical aberrations of the autocollimator's objective and their changes with the path length to the surface under test. We characterize the sensitivity of the angle measurement to changes in environmental parameters, in particular, barometric pressure. These efforts are aimed at approaching fundamental limits in the characterization of the shape of optical surfaces with autocollimator-based profilometers so that these are ready for characterizing the next generation of synchrotron and XFEL beamline optics.