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Stress-Engineered SS/LiCoO2 Thin-Film Electrodes With Enhanced Structural Integrity and Electrochemical Performance
Yibo Ma1,2, Lingfeng Zhu1,2, Qi Mai1,2
1Centre for Atomaterials and Nanomanufacturing (CAN), School of Science, RMIT University, Melbourne, Victoria, Australia.
Chemistry, an Asian Journal
|January 14, 2026
Summary
A novel stress-engineering approach prevents delamination in lithium cobalt oxide (LCO) films for all-solid-state thin-film lithium batteries (TFLBs). This method enhances mechanical stability and electrochemical performance, paving the way for robust TFLBs.
Area of Science:
- Materials Science
- Electrochemistry
- Thin Film Technology
Background:
- Delamination of lithium cobalt oxide (LCO) films on stainless steel (SS) substrates is a major obstacle for all-solid-state thin-film lithium batteries (TFLBs).
- Existing TFLBs face challenges with mechanical integrity and long-term stability due to film delamination.
- Understanding and controlling film stress is crucial for developing durable TFLB devices.
Purpose of the Study:
- To introduce and validate a stress-engineering strategy for mitigating LCO film delamination on SS substrates.
- To elucidate the mechanisms behind residual stress development in LCO thin films during deposition.
- To develop a scalable fabrication process for mechanically robust and high-performance TFLBs.
Main Methods:
- In situ stress measurements during LCO film deposition.
- Systematic variation of deposition parameters, particularly working pressure.
- Substrate pre-annealing and LCO film post-annealing treatments.
- Fabrication and testing of large-area all-solid-state TFLB cells.
Main Results:
- Identified a universal tensile-to-compressive stress transition in LCO films, with amorphous films exhibiting compressive stress due to atomic pinning.
- Working pressure was found to be the dominant parameter for controlling film stress evolution.
- Optimized annealing strategies (substrate pre-annealing and film post-annealing) effectively suppressed delamination and cracking.
- Successfully fabricated meter-scale TFLB cells with robust SS/LCO/LiPON multilayers, achieving high areal capacity and excellent cycle stability (97.1% retention after 1000 cycles).
Conclusions:
- The developed stress-engineering approach effectively resolves the delamination issue in LCO thin films for TFLBs.
- Precise control over film stress through deposition parameters and annealing is key to achieving mechanically resilient thin-film electrodes.
- This work provides a scalable and promising pathway for the commercialization of high-performance all-solid-state TFLBs.

