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Updated: Jan 17, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
A wideband tunable, nonreciprocal bandpass filter using magnetostatic surface waves with zero static power
Xingyu Du1, Yixiao Ding1, Shun Yao1
1Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA.
Abstract:
Modern wireless systems demand compact, power-efficient radio frequency (RF) front-end components that support wideband tunability and nonreciprocity. We present a class of miniature bandpass filter that achieves both continuously tunable frequency operation (4.0-17.7 GHz) and high nonreciprocity ( > 25 dB), all within a compact size of 1.07 cm³. The filter employs a microfabricated 18 µm thick Yttrium Iron Garnet (YIG) waveguide with meander-line aluminum transducers, enabling low-loss unidirectional propagation via magnetostatic surface waves. Leveraging a benzocyclobutene planarization fabrication process, this study enables a dispersion profile unique to thick YIG films, resulting in enhanced filter skirt performance with minimal spurious modes. Frequency tuning is enabled by a zero-static-power magnetic bias circuit using transient current pulses, eliminating continuous power consumption. The filter demonstrates low insertion loss (3-5 dB), high out-of-band rejection ( > 30 dB), narrow bandwidth (100-200 MHz), robust power handling ( > 10.4 dBm), and high linearity (IIP3 > 26 dBm).
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